单词silicon-tetrafluoride
网络: 四氟化硅；四氟化矽；四弗化硅
The present invention is directed to a method for treatment of a gas stream comprising silicon tetrafluoride and hydrogen chloride.
本发明涉及用于处理包含四氟化硅和氯化氢的气流的方法。
The process demonstrates an economic and environmentally friendly way to produce high quality silicon tetrafluoride.
所述方法展示了一种生产高质量四氟化硅的经济且环境友好的途径。
The silicon tetrafluoride is scrubbed with sulfuric acid.
用硫酸洗涤所述四氟化硅。